Applicability of focused Ion beam (FIB) milling with gallium, neon, and xenon to the fracture toughness characterization of gold thin films
Open Access
- 16 February 2021
- journal article
- research article
- Published by Springer Science and Business Media LLC in Journal of Materials Research
- Vol. 36 (12), 2505-2514
- https://doi.org/10.1557/s43578-020-00045-w
Abstract
No abstract availableKeywords
Funding Information
- Deutsche Forschungsgemeinschaft (GRK1896)
- Projekt DEAL
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