The ablation of polymers under excimer laser irradiation: the physics of the process and the polymer structure
- 1 December 2001
- journal article
- Published by Elsevier BV in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 185 (1-4), 147-155
- https://doi.org/10.1016/s0168-583x(01)00750-9
Abstract
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This publication has 1 reference indexed in Scilit:
- Optical and photochemical factors which influence etching of polymers by ablative photodecompositionJournal of Vacuum Science & Technology B, 1985