Fabrication of multipurpose AFM/SCM/SEP microprobe with integrated piezoresistive deflection sensor and isolated conductive tip
- 31 March 1998
- journal article
- Published by Elsevier BV in Microelectronic Engineering
- Vol. 41-42, 477-480
- https://doi.org/10.1016/s0167-9317(98)00111-7
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Sharp silicon tips for AFM and field emissionMicroelectronic Engineering, 1994