Micro-opto mechanical switch integrated on silicon
- 9 November 1995
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 31 (23), 2003-2005
- https://doi.org/10.1049/el:19951354
Abstract
A micro-opto-mechanical switch 1*2 has been achieved using a combination of two technologies, integrated optics and micromachining on silicon. The commutation is obtained by means of the mechanical deflection of a cantilever beam driven by an electrostatic force. The first functional results are reported.Keywords
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