The growth of nitrided surface layers by ion bombardment
- 1 November 1972
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 43 (11), 4809-4811
- https://doi.org/10.1063/1.1661019
Abstract
It is shown that bombardment of a tungsten surface with 300‐ and 450‐eV nitrogen ions produces an altered surface layer whose saturation concentrations are 8×1015 and 9×1015 nitrogen atoms/cm2, respectively. Mechanisms involved in the formation and decomposition of these surface layers are discussed.Keywords
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