Abstract
The rate of the hydrogen-titanium reaction has been measured at 75 °C and at hydrogen pressures between 10−4 and 10−2 Torr. Thin films of titanium were deposited on Kovar substrates at room temperature and mechanically transferred in vacuum to a reaction chamber where the rate of the reaction was measured using the flow technique. The rate of the reaction is linearly dependent on the hydrogen pressure and independent of the quantity of gas absorbed for hydrogen to titanium atomic ratios between 0.15 and 1.5.