Use of low-energy accelerators for ion implantation
- 15 April 1971
- journal article
- Published by Elsevier BV in Nuclear Instruments and Methods
- Vol. 92 (4), 465-469
- https://doi.org/10.1016/0029-554x(71)90097-8
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
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- Beam Scanner for the Oxford Electrostatic Tandem AcceleratorIEEE Transactions on Nuclear Science, 1965
- The development of magnetic ion sources for an electromagnetic isotope separatorNuclear Instruments, 1957
- Two-Directional Focusing of Charged Particles with a Sector-Shaped, Uniform Magnetic FieldReview of Scientific Instruments, 1951