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Ultralarge scale integrated metallization and interconnects
Home
Publications
Ultralarge scale integrated metallization and interconnects
Ultralarge scale integrated metallization and interconnects
CW
Christine Whitman
Christine Whitman
Mehrdad M. Moslehi
Mehrdad M. Moslehi
AP
Ajit Paranjpe
Ajit Paranjpe
LV
Lino Velo
Lino Velo
TO
Tom Omstead
Tom Omstead
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1 July 1999
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology A
Vol. 17
(4)
,
1893-1897
https://doi.org/10.1116/1.581700
Abstract
No abstract available
Keywords
INTEGRATED METALLIZATION
ULTRALARGE SCALE INTEGRATED
METALLIZATION AND INTERCONNECTS
Cited by 38 articles