Fabrication of planar silicon transistors without photoresist
- 29 February 1968
- journal article
- Published by Elsevier BV in Solid-State Electronics
- Vol. 11 (2), 261-266
- https://doi.org/10.1016/0038-1101(68)90087-7
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- The electron beam fabrication of small geometry transistorsSolid-State Electronics, 1967