Surface-micromachined Movable SOI Optical Waveguides
- 25 August 2005
- conference paper
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 1, 348-350
- https://doi.org/10.1109/sensor.1995.717198
Abstract
We demonstrate the fabrication and the micromechanical motion of a new type of optical waveguides, the surface-micromachined movable SOI optical waveguides. The movable waveguides are either in form of cantilevers and bridges. The fabrication process is based on conventional IC technology. Deflection amplitude of 1400/spl mu/m for cantilevers guiding lightwave of 1.3/spl mu/m wavelength is observed. Waveguide loss of less than 1.8dB/cm with a 10% polarization dependence is achieved.Keywords
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