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The importance of the short-circuit failure mode in aluminum electromigration
Home
Publications
The importance of the short-circuit failure mode in aluminum electromigration
The importance of the short-circuit failure mode in aluminum electromigration
JT
Janet M. Towner
Janet M. Towner
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1 November 1987
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology B
Vol. 5
(6)
,
1696-1700
https://doi.org/10.1116/1.583650
Abstract
No abstract available
Keywords
ELECTROMIGRATION
FAILURE MODE
Cited by 6 articles