Self-assembled 3-D silicon microscanners with self-assembled electrostatic drives
- 1 November 2000
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 12 (11), 1519-1521
- https://doi.org/10.1109/68.887729
Abstract
Three-dimensional, electrostatically driven resonant torsion mirror microscanners are constructed by surface tension powered out-of-plane rotation of parts formed in bonded silicon-on-insulator. Simultaneous self-assembly of the fixed electrodes using a below-substrate limiter mechanism allows scanning perpendicular to the assembly axis, and direct drive allows high-Q operation.Keywords
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