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Sputtering of lithium compounds for preparation of electrolyte thin films
Home
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Sputtering of lithium compounds for preparation of electrolyte thin films
Sputtering of lithium compounds for preparation of electrolyte thin films
ND
N.J. Dudney
N.J. Dudney
JB
J.B. Bates
J.B. Bates
RZ
R.A. Zuhr
R.A. Zuhr
CL
C.F. Luck
C.F. Luck
JR
J.D. Robertson
J.D. Robertson
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1 July 1992
journal article
Published by
Elsevier BV
in
Solid State Ionics
Vol. 53-56
,
655-661
https://doi.org/10.1016/0167-2738(92)90443-s
Abstract
No abstract available
Keywords
SPUTTERING
PLANAR
LITHIUM COMPOUNDS
EXTREMELY
LI2O
DEFICIENT
STOICHIOMETRIC
ORTHOSILICATE
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