R.f. sputtered epitaxial ZnO films on sapphire for integrated optics
- 1 October 1976
- journal article
- Published by Elsevier BV in Thin Solid Films
- Vol. 38 (2), 131-141
- https://doi.org/10.1016/0040-6090(76)90220-0
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
- Temperature determination of thin sapphire substratesJournal of Vacuum Science and Technology, 1974
- Fast electro-optic waveguide deflector modulatorApplied Physics Letters, 1973
- Acoustic surface wave properties of epitaxially grown aluminum nitride and gallium nitride on sapphireApplied Physics Letters, 1973
- Monolithically integrated Bragg deflector for an optical guided wave made of zinc-oxide filmElectronics Letters, 1973
- Epitaxially grown zinc oxide films for electro-optic and acousto-optic interactionsOptics Communications, 1973
- Low-loss epitaxial ZnO optical waveguidesApplied Physics Letters, 1972
- Light Waves in Thin Films and Integrated OpticsApplied Optics, 1971
- Evaluation of new single crystal piezoelectric materials for surface acoustic-wave applicationsUltrasonics, 1970
- EPITAXIAL ZnO ON SAPPHIREApplied Physics Letters, 1970
- Epitaxial Thin Films of ZnO on CdS and SapphireJournal of Vacuum Science and Technology, 1969