Modification of surfaces with new excimer UV sources
- 1 October 1992
- journal article
- Published by Elsevier BV in Thin Solid Films
- Vol. 218 (1-2), 231-246
- https://doi.org/10.1016/0040-6090(92)90923-y
Abstract
No abstract availableThis publication has 54 references indexed in Scilit:
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