Low-Loss SOI Photonic Wires and Ring Resonators Fabricated With Deep UV Lithography
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- 4 May 2004
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 16 (5), 1328-1330
- https://doi.org/10.1109/lpt.2004.826025
Abstract
We demonstrate single-mode photonic wires in silicon-on-insulator with propagation loss as low as 2.4 dB/cm, fabricated with deep ultraviolet lithography and dry etching. We have also made compact racetrack and ring resonators functioning as add-drop filters, attaining Q values larger than 3000 and low add-drop crosstalk.Keywords
This publication has 8 references indexed in Scilit:
- Large-scale production techniques for photonic nanostructuresPublished by SPIE-Intl Soc Optical Eng ,2003
- Analysis of Line Edge Roughness Using Probability Process Model for Chemically Amplified ResistsJapanese Journal of Applied Physics, 2003
- Asymmetrically coupled silicon-on-insulator microring resonators for compact add-drop multiplexersIEEE Photonics Technology Letters, 2003
- Enhanced quantitative analysis of resist image contrast upon line- edge roughness (LER)Published by SPIE-Intl Soc Optical Eng ,2003
- Scattering at sidewall roughness in photonic crystal slabsOptics Letters, 2003
- Fabrication of photonic crystals in silicon-on-insulator using 248-nm deep UV lithographyIEEE Journal of Selected Topics in Quantum Electronics, 2002
- Fabrication of ultralow-loss Si/SiO_2 waveguides by roughness reductionOptics Letters, 2001
- Optical modelling of photonic crystals and VCSELs using eigenmode expansion and perfectly matched layersOptical and Quantum Electronics, 2001