Ellipsometry algorithm for absorbing films

Abstract

Easy sample preparation and measurement makes ellipsometry attractive for surface and film investigations; however, specialized numerical methods are normally required to relate measurements to unknown physical attributes of reflecting surfaces. Although solution techniques have been developed, the problem of data analysis is by no means solved. This paper presents an alternative method for computation of the thickness and optical properties of an absorbing film overlying a known substrate from ellipsometer data obtained at two light incidence angles. Tests for selected cases required no a priori knowledge of the film, in contrast to other methods.