Effect of dilution gases in methane on the deposition of diamond-like carbon in a microwave discharge
- 28 June 1985
- journal article
- Published by Elsevier BV in Thin Solid Films
- Vol. 128 (3-4), 341-351
- https://doi.org/10.1016/0040-6090(85)90084-7
Abstract
No abstract availableKeywords
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