Influence of solvent and molecular weight on thickness and surface topography of spin‐coated polymer films
- 1 June 1990
- journal article
- research article
- Published by Wiley in Polymer Engineering & Science
- Vol. 30 (11), 644-653
- https://doi.org/10.1002/pen.760301104
Abstract
No abstract availableKeywords
This publication has 23 references indexed in Scilit:
- Film flow on a rotating diskPhysics of Fluids, 1986
- Transient behavior of spin-coated resist film thickness based on invariance of viscous fluid under similarity transformationIEEE Transactions on Electron Devices, 1986
- FLOW AND FILM THICKNESS OF BINGHAM PLASTIC LIQUIDS ON A ROTATING DISKChemical Engineering Communications, 1985
- Coating flow of non-Newtonian fluids on a flat rotating diskIndustrial & Engineering Chemistry Fundamentals, 1984
- Effects of solvent mass transfer on flow of polymer solutions on a flat rotating diskIndustrial & Engineering Chemistry Fundamentals, 1984
- The rheology and spin coating of polyimide solutionsPolymer Engineering & Science, 1983
- Characteristics of resist films produced by spinningJournal of Applied Physics, 1978
- Rheology and Modeling of the Spin Coating ProcessIBM Journal of Research and Development, 1977
- On the Flow of a Non-Newtonian Liquid on a Rotating DiskJournal of Applied Physics, 1960
- Flow of a Viscous Liquid on a Rotating DiskJournal of Applied Physics, 1958