S-shaped magnetic macroparticle filter for cathodic arc deposition
- 1 January 1997
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Plasma Science
- Vol. 25 (4), 670-674
- https://doi.org/10.1109/27.640683
Abstract
No abstract availableThis publication has 17 references indexed in Scilit:
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