Characterization of Si/SiO2 interface defects by electron spin resonance
- 1 January 1983
- journal article
- review article
- Published by Elsevier BV in Progress in Surface Science
- Vol. 14 (3), 201-294
- https://doi.org/10.1016/0079-6816(83)90006-0
Abstract
No abstract availableKeywords
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