Internal Electrode Piezoelectric Ceramic Actuator

Abstract
An internal electrode multilayer piezoelectric ceramic actuator element has been investigated. An individual internal electrode has the same area as the element cross section area. It has no piezoelectric inactive part, so that it shows strain/field characteristics similar to plain piezoelectric ceramics. It can be driven by a relatively low voltage (200 V) and has a semipermanent life under a successive voltage pulse application. Typical properties of the element using 0.65Pb(Mg1/3Nb2/3)O3-0.35PbTiO3 ceramics are 8.7×10-4 strain, over 3.5×107 N/m2 stress and within 100 µsec response time driven by 1×106 V/m field.