The deposition of niobium, NbN and Nb2O5 films by filtered arc evaporation
- 1 March 1993
- journal article
- research article
- Published by Springer Science and Business Media LLC in Journal of Materials Science Letters
- Vol. 12 (5), 322-323
- https://doi.org/10.1007/bf01910091
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
- Thin vapour-deposited niobium pentoxide filmsThin Solid Films, 1991
- Ion-beam-deposited films produced by filtered arcevaporationThin Solid Films, 1990
- X-ray diffraction studies of physically vapour-deposited coatingsSurface and Coatings Technology, 1989
- Structure and preferred orientations in ion-plated niobium films and correlation of the substrate bias voltage with calculated strain energiesThin Solid Films, 1989
- Niobium-stress influence on Nb/Al-oxide/Nb Josephson junctionsJournal of Applied Physics, 1988
- Characterization of a Ti vacuum arc and the structure of deposited Ti and TiN filmsJournal of Vacuum Science & Technology A, 1987
- Fabrication of NbN Films by dc Bias Sputtering and Their Application to Superconducting BridgesJapanese Journal of Applied Physics, 1983
- Intrinsic stress of magnetron-sputtered niobium filmsThin Solid Films, 1979
- Effect of Dissolved Gases on Some Superconducting Properties of NiobiumPhysical Review B, 1963