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Effects of ion species and adsorbed gas on dry etching induced damage in GaAs
Home
Publications
Effects of ion species and adsorbed gas on dry etching induced damage in GaAs
Effects of ion species and adsorbed gas on dry etching induced damage in GaAs
S. W. Pang
S. W. Pang
MG
M. W. Geis
M. W. Geis
NE
N. N. Efremow
N. N. Efremow
GL
G. A. Lincoln
G. A. Lincoln
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1 January 1985
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology B
Vol. 3
(1)
,
398-401
https://doi.org/10.1116/1.583272
Abstract
No abstract available
Cited by 48 articles