High-intensity sources of incoherent UV and VUV excimer radiation for low-temperature materials processing
- 15 December 2000
- journal article
- Published by Elsevier BV in Applied Surface Science
- Vol. 168 (1-4), 29-36
- https://doi.org/10.1016/s0169-4332(00)00571-7
Abstract
No abstract availableKeywords
This publication has 65 references indexed in Scilit:
- New large area ultraviolet lamp sources and their applicationsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1997
- Extended Broad-band Emission in Vacuum Ultraviolet by Multi-Rare-Gas Silent DischargesJapanese Journal of Applied Physics, 1995
- UV emission from excited inert-gas moleculesSoviet Physics Uspekhi, 1992
- Silent-discharge driven excimer UV sources and their applicationsApplied Surface Science, 1992
- Industrial applications of excimer ultraviolet sourcesMaterials & Design (1980-2015), 1991
- Modeling and applications of silent discharge plasmasIEEE Transactions on Plasma Science, 1991
- UV excimer radiation from dielectric-barrier dischargesApplied Physics B Laser and Optics, 1988
- Active media of exciplex lasers (review)Soviet Journal of Quantum Electronics, 1980
- Excimer LasersPublished by Springer Science and Business Media LLC ,1979
- Continuous Emission Spectra of Rare Gases in the Vacuum Ultraviolet RegionJournal of the Optical Society of America, 1955