Improved depth resolution in Auger depth profiling of multilayered thin films by reactive ion sputtering
- 1 February 1979
- journal article
- Published by Wiley in Surface and Interface Analysis
- Vol. 1 (1), 32-35
- https://doi.org/10.1002/sia.740010107
Abstract
No abstract availableKeywords
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- Techniques for elemental composition profiling in thin filmsC R C Critical Reviews in Solid State Sciences, 1973