Fabrication of multi-tiered structures on step and flash imprint lithography templates
- 12 February 2003
- journal article
- Published by Elsevier BV in Microelectronic Engineering
- Vol. 67-68, 221-228
- https://doi.org/10.1016/s0167-9317(03)00075-3
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
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