High Temperature Gas Reaction Specimen Chamber for an Electron Microscope

Abstract

High temperature gas reaction specimen chamber for an electron microscope has been constructed. The specimen under electron microscopic observation can be heated at about 1000°C in a gas layer at a pressure of about 300 Torr. The specimen is placed on a film covering the minute hole in the platinum ribbon and heated by an electric current sent through the ribbon. The gas is supplied around the specimen through a pipe and overflows into the vacuum of microscope column through the two platinum apertures on either side of the ribbon. The overflows gas from the specimen chamber is pumped out seperately from the evacuation system of main column. The minute hole in the ribbon and platinum apertures on either side of the ribbon are set to enable the passage of electron beams. The specimen stage can be taken out from the vacuum of electron microscope column through an air lock system without breaking down the vacuum. Some observations of gas reaction processes at elevated temperature by using the present device are presented.