Influence of Water on Photochemical Reaction of Positive-Type Photoresist
- 1 October 1990
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 29 (10R)
- https://doi.org/10.1143/jjap.29.2152
Abstract
Water content in a positive-type photoresist film has an important role in the photochemical reaction. We have studied how the water content influences the photochemical reaction of a positive-type photoresist. To proceed the reaction, a water supply was required for the positive-type resist film. This phenomenon is remarkably observed in the case of a thick film. The water usually had to be supplied by the moisture in the atmosphere by diffusion on the thin film. Even on a thick resist film, completeness of the reaction was obtained by some treatment of water absorption. By introducing a sufficicient amount of water into a resist film for the reaction while keeping it in air for a long time or soaking it in a water bath, a patterning of the thick resist film was accomplished.Keywords
This publication has 1 reference indexed in Scilit:
- Über die Natur der Belichtungsprodukte von Diazoverbindungen. Übergänge von aromatischen 6‐Ringen in 5‐RingeEuropean Journal of Organic Chemistry, 1944