Spectroscopic study of chemical phase separation in zirconium silicate alloys
- 1 July 2003
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 21 (4), 1783-1791
- https://doi.org/10.1116/1.1593646
Abstract
This article presents a comprehensive spectroscopic study of chemical phase separation in zirconium silicate alloys, ( ZrO 2 ) x ( SiO 2 ) 1−x , using Fourier transform infrared spectroscopy,x-ray photoelectron spectroscopy,extended x-ray absorption fine structure spectroscopy, and near edge x-ray absorption spectroscopy. These measurements are complemented by measurements of x-ray diffraction and high resolution transmission electronic microscopy imaging. This combination has been applied to Zr silicate alloys, providing the first comprehensive comparisons of the relative sensitivities of these spectroscopic techniques applied to micro- and nanoscale chemical phase separation of high-k dielectric alloys.Keywords
This publication has 8 references indexed in Scilit:
- Nonlinear composition dependence of x-ray photoelectron spectroscopy and Auger electron spectroscopy features in plasma-deposited zirconium silicate alloy thin filmsJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2002
- Electronic structure of high-k transition metal oxides and their silicate and aluminate alloysJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2002
- High temperature stability in lanthanum and zirconia-based gate dielectricsJournal of Applied Physics, 2001
- Electronic structure of noncrystalline transition metal silicate and aluminate alloysApplied Physics Letters, 2001
- High-κ gate dielectrics: Current status and materials properties considerationsJournal of Applied Physics, 2001
- The Structure of Plasma-Deposited and Annealed Pseudo-Binary ZrO2-SiO2 AlloysMRS Proceedings, 2000
- Infrared spectroscopic study of SiOx films produced by plasma enhanced chemical vapor depositionJournal of Vacuum Science & Technology A, 1986
- Longitudinal Optical Vibrations in Glasses: Geand SiPhysical Review Letters, 1976