Simple parallel plate energy analyser for measuring the energy distribution of metal vapours in a discharge
- 1 December 1980
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 13 (12), 1305-1308
- https://doi.org/10.1088/0022-3735/13/12/019
Abstract
The design and performance are described of a simple and inexpensive parallel-plate energy analyser used for measuring the energy distribution of ions reaching the cathode of an abnormal glow discharge particularly under the actual conditions pertaining during the evaporation of a metal in the ion plating process.Keywords
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