Wide Bandwidth Silicon Nitride Grating Coupler

3 August 2010

journal article
Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters

Vol. 22 (19), 1461-1463
https://doi.org/10.1109/lpt.2010.2062497

Abstract

We demonstrate a one-dimensional grating coupler in silicon nitride with a 67-nm 1-dB bandwidth, the largest reported for a grating coupler butt-coupled to standard single-mode fiber. The peak coupling efficiency is -4.2dB. It requires no partial etch and requires only 0.6-μm fabrication resolution.

Keywords

This publication has 7 references indexed in Scilit:

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