Stress behaviour of magnetron-sputtered SiC thin films on thermal cycling and annealing
- 1 June 1991
- journal article
- Published by Elsevier BV in Thin Solid Films
- Vol. 201 (1), 69-80
- https://doi.org/10.1016/0040-6090(91)90155-q
Abstract
No abstract availableThis publication has 14 references indexed in Scilit:
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