Measurement of High Resistivity Semiconductors Using the van der Pauw Method
- 1 June 1973
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 44 (6), 698-700
- https://doi.org/10.1063/1.1686224
Abstract
Apparatus is described that permits measurement of the electrical transport properties of semiconductors with resistance values over 1012 Ω. The system utilizes a guarded approach to the van der Pauw method which simplifies sample geometry and contacting and permits evaluation of thin layers. The equipment is easy to operate, reliable, and constructed of readily available commercially purchased components.Keywords
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