High aspect ratio micro tool manufacturing for polymer replication using μEDM of silicon, selective etching and electroforming
- 6 February 2008
- journal article
- Published by Springer Science and Business Media LLC in Microsystem Technologies
- Vol. 14 (9-11), 1757-1764
- https://doi.org/10.1007/s00542-008-0564-9
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
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- Indirect tooling based on micromilling, electroforming and selective etchingPublished by Elsevier BV ,2006
- Microfluidic Blood/Plasma Separation Unit Based on Microchannel Bend StructuresPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- Machining of micro/miniature dies and moulds by electrical discharge machining—Recent developmentJournal of the American Academy of Dermatology, 2005