Synthesis of diamond films in a rf induction thermal plasma
- 7 September 1987
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 51 (10), 737-739
- https://doi.org/10.1063/1.98851
Abstract
Microcrystals and microcrystalline films of diamond were prepared on molybdenum substrates in a thermal plasma which was produced by rf inductive heating in an argon‐hydrogen‐methane mixture gas under 1 atm pressure. The deposition rate amounted to 1 μm/min.Keywords
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