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Materials of LIGA technology
Home
Publications
Materials of LIGA technology
Materials of LIGA technology
WE
W. Ehrfeld
W. Ehrfeld
VH
V. Hessel
V. Hessel
HL
H. Löwe
H. Löwe
CS
C. Schulz
C. Schulz
LW
L. Weber
L. Weber
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26 February 1999
journal article
Published by
Springer Science and Business Media LLC
in
Microsystem Technologies
Vol. 5
(3)
,
105-112
https://doi.org/10.1007/s005420050150
Abstract
No abstract available
Keywords
MICROSTRUCTURE
MAGNETIC PROPERTY
SPECIFIC FUNCTION
COMMERCIAL PRODUCTION
PROCESS STEP
Cited by 62 articles