The use of ?actinometer? gases in optical diagnostics of plasma etching mixtures: SF6-O2
- 1 December 1981
- journal article
- Published by Springer Science and Business Media LLC in Plasma Chemistry and Plasma Processing
- Vol. 1 (4), 365-375
- https://doi.org/10.1007/bf00565993
Abstract
No abstract availableKeywords
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