A New Type of Low-ϰ Dielectric Films Based on Polysilsesquioxanes
- 27 September 2002
- journal article
- research article
- Published by Wiley in Advanced Materials
- Vol. 14 (19), 1369-1373
- https://doi.org/10.1002/1521-4095(20021002)14:19<1369::aid-adma1369>3.0.co;2-i