A new method for ellipsometric inversion with microcomputers: Characterization of optically absorbing films using multiple-angle-of-incidence
- 1 June 1989
- journal article
- Published by Elsevier BV in Surface Science
- Vol. 216 (1-2), 198-208
- https://doi.org/10.1016/0039-6028(89)90653-5
Abstract
No abstract availableThis publication has 14 references indexed in Scilit:
- Numerical method for the ellipsometric determination of optical constants and thickness of thin films with microcomputersSurface Science, 1988
- Ellipsometric data processing: an efficient method and an analysis of the relative errorsApplied Optics, 1985
- A NEW ELLIPSOMETRIC PROGRAMME APPLIED TO THE CHARACTERIZATION OF TRANSPARENT CONDUCTING TITANIUM NITRIDE FILMSLe Journal de Physique Colloques, 1983
- Method for numerical inversion of the ellipsometry equation for transparent filmsJournal of the Optical Society of America, 1983
- Ellipsometric study of anodic oxide growth: Application to the titanium oxide systemsThin Solid Films, 1983
- Implications of three parameter solutions to the three-layer modelSurface Science, 1976
- Ellipsometric analyses for an absorbing surface film on an absorbing substrate with or without an intermediate surface layerSurface Science, 1976
- Generalized ellipsometric method for the determination of all the optical constants of the system: Optically absorbing film on an absorbing substrateSurface Science, 1976
- Ellipsometer Data Analysis with a Small Programmable Desk CalculatorApplied Optics, 1972
- Error analysis of angle of incidence measurementsSurface Science, 1969