Fabrication technologies for vertically coupled microring resonator with multilevel crossing busline and ultracompact-ring radius
Open Access
- 22 February 2005
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Journal of Selected Topics in Quantum Electronics
- Vol. 11 (1), 4-10
- https://doi.org/10.1109/jstqe.2004.841720
Abstract
To eliminate the scattering loss at the crossing points of cross-grid busline waveguides, the multilevel crossing structure of the busline waveguides was introduced into a vertically coupled microring resonator (VCMRR) filter. To achieve this structure, two fabrication technologies were newly developed; one is a method to planarize perfectly the top surface of each buried waveguide, and the other is a method to fabricate microring waveguides with very smooth sidewalls. Using the latter method, an ultracompact VCMRR with a ring radius of 5 /spl mu/m was realized and a free spectral range of 37 nm was successfully demonstrated. Next, using the former method, single-ring and quadruple series-coupled ring resonators with multilevel crossing busline waveguides were fabricated. A clear filter response was obtained for the single-microring resonator, and a boxlike filter response was obtained for the quadruple series-coupled microring resonator with multilevel crossing busline waveguides.Keywords
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