Radiolysis of resist polymers. 5. Poly(haloalkyl α-chloroacrylates) and copolymers with methyl methacrylate
- 1 December 1984
- journal article
- Published by American Chemical Society (ACS) in Macromolecules
- Vol. 17 (12), 2761-2764
- https://doi.org/10.1021/ma00142a056