Rf driven multicusp ion source for pulsed or steady-state ion beam production
- 1 April 1993
- journal article
- Published by Elsevier BV in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 74 (1-2), 291-294
- https://doi.org/10.1016/0168-583x(93)95063-b
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- rf driven multicusp H− ion sourceReview of Scientific Instruments, 1991
- Applications of SIMOX technology to CMOS LSI and radiation-hardened devicesNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987