Thermal nitridation of Si(100)-2 × 1 surface by NH3: XPS results
- 2 February 1989
- journal article
- Published by Elsevier BV in Surface Science
- Vol. 209 (1-2), 115-130
- https://doi.org/10.1016/0039-6028(89)90062-9
Abstract
No abstract availableKeywords
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