X-ray reflectivity measurements of the expansion of carbon films upon annealing
- 21 October 1991
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 59 (17), 2100-2102
- https://doi.org/10.1063/1.106093
Abstract
Measurements have been made of the x-ray reflectivity from ultrathin, amorphous carbon films both before and after annealing. Analysis of the x-ray results indicates that annealing causes an increase in film thickness with a corresponding decrease in density. Such behavior is uncharacteristic of amorphous thin films and is interpreted as being due to changes in the interatomic bonding associated with transition to a more graphitic microstructure.Keywords
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