Chemical Vapor Deposition of Single-Crystalline ZnO Film with Smooth Surface on Intermediately Sputtered ZnO Thin Film on Sapphire
- 1 May 1978
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 17 (5), 773-778
- https://doi.org/10.1143/jjap.17.773