Nanoimprinting of conductive tracks using metal nanopowders
- 1 October 2007
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 91 (14), 143117
- https://doi.org/10.1063/1.2795789
Abstract
A method for metalnanopowder imprinting is proposed as a patterning process for conductive tracks, which is inexpensive and scalable down to submicrometers. To examine the feasibility of the proposed method, conductive tracks with widths of submicrometers to a few tens of micrometers were formed using a thermal nanoimprinting system, and the effects of processing conditions on the degree of replication and the degree of sintering and the electric conductivity of imprinted conductive tracks were analyzed.Keywords
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