Mechanical and optical properties of hard SiCN coatings prepared by PECVD
- 1 January 2004
- journal article
- Published by Elsevier BV in Thin Solid Films
- Vol. 447-448, 201-207
- https://doi.org/10.1016/s0040-6090(03)01057-5
Abstract
No abstract availableKeywords
Funding Information
- Ministerstvo Školství, Mládeže a Tělovýchovy (MSM 235200002)
- Natural Sciences and Engineering Research Council of Canada
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