Automatic Plotting of Conductance and Capacitance of Metal-Insulator-Semiconductor Diodes or Any Two Terminal Complex Admittance
- 1 September 1966
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 37 (9), 1195-1201
- https://doi.org/10.1063/1.1720456
Abstract
A very important feature of present day semiconductor device technology is the measurement of the complex impedance or admittance characteristics of two‐terminal diodes or three‐terminal transistors. An electronic technique has been developed to automatically and continuously display the incremental conductance and capacitance of any two terminal nonlinear admittance as a function of applied dc bias over a frequency range 10 cps to 100 kc. The method employs phase sensitive detection to separate the in‐phase and quadrature components of the signal generated by a diode under test. Phase angle settings can be made to better than 0.1°. The system can measure over at least five orders of magnitude in admittance, and conductances as low as 0.001 μmho can be detected. The detection sensitivity of the apparatus is 0.0032 μV in a signal‐to‐noise ratio of 6.5×10−3. The performance of the system is described in terms of actual experimental data that have been obtained on various metal‐insulator‐semiconductor diodes.Keywords
This publication has 15 references indexed in Scilit:
- Phonon Spectroscopy of Germanium-Silicon Tunnel HeterojunctionsPhysical Review B, 1966
- Low Level Second Harmonic Detection SystemReview of Scientific Instruments, 1965
- Ion Transport Phenomena in Insulating FilmsJournal of Applied Physics, 1965
- Alternate Approach to the Resolution of Tunneling Current Structure by DifferentiationReview of Scientific Instruments, 1964
- Apparatus for Measuring Characteristics of Superconducting Tunnel JunctionsReview of Scientific Instruments, 1964
- Tunneling Current Structure Resolution by DifferentiationReview of Scientific Instruments, 1963
- Image of the Phonon Spectrum in the Tunneling Characteristic Between SuperconductorsPhysical Review Letters, 1963
- Automatic Plotting Device for the Second Derivative of Langmuir Probe CurvesReview of Scientific Instruments, 1963
- Phonon-Assisted Tunneling in Silicon and Germanium Esaki JunctionsPhysical Review B, 1962
- Automatic Conductivity Plotting MachineReview of Scientific Instruments, 1961