Co-Implantation of Mo+and S+in Al2O3and ZrO2and Their Tribological Properties

Abstract

Al₂O₃ and ZrO₂, substrates were coimplanted with 175 keV Mo ⁺and 74 keV S⁺ at doses of 1 × 10²¹ m⁻² and 2 × 10²¹ m⁻², respectively. The energies of Mo⁺ and S⁺ ions were chosen to provide nearly overlapping depth profiles in both substrates. Rutherford backscattering (RBS), Auger electron spectroscopy (AES) and transmission electron microscopy (TEM) techniques were used for the characterization of the implanted surfaces. The as implanted surface of Al₂O₃ became amorphous while the as implanted ZrO₂ surface remained crystalline. The MoS₂ phase was observed in the implanted region of Al₂O₃ and ZrO₂ after furnace annealing at 700°C. The friction and wear properties of implanted and unimplanted surfaces were measured in a reciprocating pin-on-plate machine at room temperature in air. Ion implanted MoS₂ synthesized ZrO₂ surfaces show a reduction in both friction and wear as compared to unimplanted surfaces. No appreciable effect was found for ion-implanted Al₂O₃.